To prevent process contamination/gases from condensing. To minimize cleaning intervals, resulting in less maintenance work. The valves shown in the picture are for CVD- and Plasma etching systems.
Description:
Engineering with VAT:
Our engineers are experienced in solutions concerning:
- integration into system concepts
- application in cleanrooms
- regular temperature distribution
- valve with integrated heating controller
- protection against accidental contact
- simple mounting
Please contact VAT to determinate the best heating solution for your specific application.
